Method to fabricate variable work function gates for FUSI devices

ABSTRACT

An embodiment of fabrication of a variable work function gates in a FUSI device is described. The embodiment uses a work function doping implant to dope the polysilicon to achieve a desired work function. Selective epitaxy growth (SEG) is used to form silicon over the source/drain regions. The doped poly-Si gate is fully silicided to form fully silicided gates that have a desired work function. We provide a substrate having a NMOS region and a PMOS region. We form a gate dielectric layer and a gate layer over said substrate. We perform a (gate Vt) gate layer implant process to implant impurities such as P+, As+, B+, BF 2 +, N+, Sb+, In+, C+, Si+, Ge+ or Ar+ into the gate layer gate in the NMOS gate regions and said PMOS gate regions. We form a cap layer over said gate layer. We pattern said cap layer, said gate layer and said gate dielectric layer to form a NMOS gate and a PMOS gate. Spacers are formed and S/D regions are formed. A metal is deposited over said substrate surface. We anneal said metal layer to form fully silicided NMOS gate and fully silicided PMOS gate.

BACKGROUND OF INVENTION

1) Field of the Invention

This invention relates generally to the fabrication of semiconductor devices and particularly to the fabrication of variable work function gates for fully silicided (FUSI) devices.

2) Description of the Prior Art

In order to cater to different product applications, ultra large scale integrated (ULSI) circuits generally include a multitude of transistors with different threshold voltage, Vt values. This is true even for the same polarity devices, for e.g., for NMOSFETs, there is a need to fabricate high Vt, low Vt, and regular Vt devices on the same platform. Typically, the threshold voltages are tuned using Vt adjustment implants into the channel. However, excessive channel doping can degrade carrier mobility due to impurity scattering.

Relevant technical developments in the patent literature can be gleaned by considering the following.

-   J. H. Sim, H. C. Wen, J. P. Lu, and D. L. Kwong, Dual Work Function     Metal Gates Using Full Nickel Silicidation of Doped Poly-Si, IEEE     ELECTRON DEVICE LETTERS, VOL. 24, NO. 10, OCTOBER 2003 631- -   Lahir S. Adam, Christopher Bowen, and Mark E. Law, On Implant-Based     Multiple Gate Oxide Schemes for System-on-Chip Integration, IEEE     TRANSACTIONS ON ELECTRON DEVICES, VOL. 50, NO. 3, MARCH 2003     589-600, -   U.S. Pat. No. 6,589,866 Besser, et al. Jul. 8, 2003—Metal gate with     PVD amorphous silicon layer having implanted dopants for CMOS     devices and method of making with a replacement gate process. -   U.S. Pat. No. 6,555,453—Xiang, et al. Apr. 29, 2003—Fully nickel     silicided metal gate with shallow junction formed. -   US Patent Application 20040106261 A1 Huotari, et al.—Method of     forming an electrode with adjusted work function. -   US Patent Application 20020008257—RNAK, et al. Jan. 24, 2002

SUMMARY OF THE INVENTION

The example embodiments of the present invention provide a structure and a method of fabrication of a variable work function gates in a FUSI device.

An example embodiment for a method of fabrication of a variable work function gates in a FUSI device comprising the steps of:

-   -   a) providing a substrate having a NMOS region and a PMOS region;     -   b) forming a gate dielectric layer and a gate layer over the         substrate;     -   c) performing a pre-dope polysilicon implant process by         implanting impurities into the gate layer gate prior to gate         patterning according to Vt requirements;     -   d) forming a cap layer over the gate layer;     -   e) patterning the cap layer, the gate layer and the gate         dielectric layer to form a NMOS gate dielectric layer, a NMOS         gate and NMOS cap in the NMOS region and a PMOS gate dielectric         layer, a PMOS gate and PMOS cap in the PMOS region;     -   f) performing a NMOS SDE implant process to form NMOS SDE         regions in the NMOS region;     -   g) performing a PMOS SDE implant to form PMOS SDE regions in the         PMOS region;     -   h) forming NMOS spacers on the sidewalls of the NMOS gate and         forming PMOS spacers on the sidewalls of the PMOS gate;     -   i) performing a NMOS S/D implant process to form NMOS S/D         regions in the NMOS region;     -   j) performing a PMOS S/D implant to form PMOS S/D regions in the         PMOS region;     -   k) annealing the substrate to activate the impurities in the         substrate;     -   l) forming a NMOS silicon layer over the NMOS S/D region and a         PMOS silicon layer over the PMOS S/D region using a selective         epitaxial growth process;     -   m) removing the NMOS cap and the PMOS cap using a selective etch         process;     -   n) depositing a metal over the substrate surface and the NMOS         gate and the PMOS gate;     -   o) annealing the metal layer to form fully silicided NMOS gate         and fully silicided PMOS gate and raised silicided NMOS S/D         regions and raised silicided PMOS S/D regions; thereby the fully         silicided NMOS gate and fully silicided PMOS gate have variable         work functions.

Other example embodiments are shown in the detailed description and in the claims as filed and amended.

The above and below advantages and features are of representative embodiments only, and are not exhaustive and/or exclusive. They are presented only to assist in understanding the invention. It should be understood that they are not representative of all the inventions defined by the claims, to be considered limitations on the invention as defined by the claims, or limitations on equivalents to the claims. For instance, some of these advantages may be mutually contradictory, in that they cannot be simultaneously present in a single embodiment. Similarly, some advantages are applicable to one aspect of the invention, and inapplicable to others. Furthermore, certain aspects of the claimed invention have not been discussed herein. However, no inference should be drawn regarding those discussed herein relative to those not discussed herein other than for purposes of space and reducing repetition. Thus, this summary of features and advantages should not be considered dispositive in determining equivalence. Additional features and advantages of the invention will become apparent in the following description, from the drawings, and from the claims.

BRIEF DESCRIPTION OF THE DRAWINGS

The features and advantages of a semiconductor device according to the present invention and further details of a process of fabricating such a semiconductor device in accordance with the present invention will be more clearly understood from the following description taken in conjunction with the accompanying drawings in which like reference numerals designate similar or corresponding elements, regions and portions and in which:

FIGS. 1A, 1B, 1C, 1D, 2 through 8 are cross sectional views for illustrating a method of fabrication of a variable work function gates in a FUSI device according to an example embodiment of the present invention.

DETAILED DESCRIPTION OF THE EXAMPLE EMBODIMENTS

Embodiments of the present invention can eliminate the problem of poly-depletion and excessive channel doping for threshold voltage adjustment by forming CMOS devices using FUSI gates with variable work functions. This can be achieved by implanting suitable dopants at desired dose into the poly-Si gates prior to the FUSI process. This invention is not limited to only NiSi metal gates and is applicable to any metal-silicide system.

Example Embodiment

An example embodiment of the present invention will be described in detail with reference to the accompanying drawings. The present invention provides a method of fabrication of a variable work function gates in a FUSI device.

A. Provide a Substrate Having a NMOS Region and a PMOS Region

Referring to FIG. 1A, we provide a substrate 10 having a NMOS region 12 and a PMOS region 14. The NMOS region is where NMOS type device can be formed. The PMOS region is where PMOS type devices can be formed.

The substrate 10 preferably has isolation regions 20 that can separate the NMOS region 12 and the PMOS region 14.

The substrate 10 can be comprised of a crystalline silicon wafer, a silicon on insulator substrate (SOI), strained silicon or SiGe (silicon-germanium).

B. Forming a Gate Dielectric Layer and a Gate Layer

Next we form a gate dielectric layer 21 and a gate layer 25 preferably comprised of poly crystalline silicon (poly-Si) over the substrate. Gate layer 25 can also be made of poly crystalline silicon-germanium (poly-SiGe).

The gate layer 25 preferably has a thickness between 50 and 80 nm.

C. Perform a Pre-Dope Gate (Polysilicon) (Gate Vt Adjustment) Implant Process into the NMOS Gate Region

In this step, we perform a (polysilicon) gate layer pre-dope (gate Vt adjust) implant process in both the NMOS and PMOS gate regions to implant impurities such as P+, As+, B+, BF₂+, N+, Sb+, In+, C+, Si+, Ge+ or Ar+ into the gate layer 25 prior to gate patterning, according to Vt requirements.

Referring to FIG. 1B, we perform a NMOS gate pre-dope gate layer implant process 27 into gate layer 25 to form NMOS gate region 23 in the NMOS region 12.

The NMOS gate pre-dope implant process 27 preferably comprises forming a NMOS gate pre-dope mask 16 over the PMOS region 14 and implanting gate dopant ions 27 into the gate layer 25 in the NMOS region 12. We remove the NMOS gate pre-dope mask 16.

D. Performing a Pre-Dope Gate Layer (Gate Vt Adjustment) Implant Process into the PMOS Gate Region

Referring to FIG. 1C, we perform a PMOS gate pre-dope gate layer implant process 29 into gate layer 25 to form PMOS gate region 17 in the PMOS region 14.

The PMOS gate pre-dope gate layer implant process 29 preferably comprises forming a PMOS gate pre-dope mask 18 over the NMOS region 12 and implanting gate dopant ions 29 into the gate layer 25 in the PMOS region 14.

We remove the PMOS gate pre-dope mask 18.

For the gate dopant ion implantation process, the implantation dose for the impurities is in the range of 5×10¹⁴/cm² and 1×10¹⁶/cm², with implantation energies of between 3 keV and 100 keV. The resulting impurity concentration in the gate layer is in the range of 1E18 atoms/cm³ and 3E20 atoms/cm³.

We can include co-dopants to modulate the Vt such as P+, As+, B+, BF₂+, N+, Sb+, In+, C+, Si+, Ge+ or Ar+. Co-dopants refer to any combination of the impurity species listed above that is to be implanted into the gate layer 25. The advantage is that sometimes there may not exist a single type of dopant that can modify the gate work function to meet the Vt requirements. Hence, by the implantation of different dopants into the gate, we can tailor the work function more easily since different dopants can have different effects on the work function. Another advantage is that we can make use of the different ions for stress engineering in the gate. Different amount of stress in the gate can result in different Vt of the devices.

This ion implantation process is the main doping of the poly-Si for Vt setting. Preferably the source/drain extension (SDE) ion implantation does not dope the poly-Si because there will be a nitride cap layer over the poly-Si.

E. Form a Cap Layer Over the Gate Layer

Next, we form a cap layer over the gate layer 25. The cap layer is preferably comprised of SiN and has a thickness between 300 and 800 angstroms.

F. Patterning the Cap Layer, the Gate Layer and the Gate Dielectric Layer

As shown in FIG. 1D, we pattern the cap layer, the gate layer 25 and the gate dielectric layer 21 to form a NMOS gate dielectric layer 22, a NMOS gate 26 and NMOS cap 30 in the NMOS region 12 and a PMOS gate dielectric layer 24, a PMOS gate 28 and PMOS cap 32 in the PMOS region 14.

G. Perform a NMOS SDE Implant Process

Referring to FIG. 2, we perform a NMOS source/drain extension (SDE) implant process 35 to form NMOS SDE regions 36 in the NMOS region 12.

The NMOS SDE implant process 35 preferably comprises forming a NMOS SDE mask 34 over the PMOS region 14 and implanting N type impurity ions 35 into the substrate 10 in the NMOS region 12 and the NMOS cap 30.

We remove the NMOS SDE mask 34.

Preferably the NMOS SDE ion implantation does not dope the poly gate layer.

The NMOS SDE implant is performed with P or As ions at a dose between 5×10¹⁴/cm² and 3×10¹⁵/cm² and an energy between 0.5 keV and 15 keV.

H. Perform a PMOS SDE Implant

Referring to FIG. 3, we perform a PMOS SDE implant 39 to form PMOS SDE regions 38 in the PMOS region 14.

The PMOS SDE implant process 39 comprises forming a PMOS SDE mask 37 over the NMOS region 12 and implanting P type impurity ions 39 into the substrate 10 in the PMOS region 14 and the PMOS cap 32.

The PMOS SDE implant is performed with B or BF₂ ions at a dose between 5×10¹⁴/cm² and 3×10¹⁵/cm² and an energy between 0.2 keV and 10 keV.

We remove the PMOS SDE mask 37.

I. Form NMOS Spacers and PMOS Spacers

Referring to FIG. 4, we form NMOS spacers 42 on the sidewalls of the NMOS gate 26 and forming PMOS spacers 44 on the sidewalls of the PMOS gate 28.

The NMOS spacers 42 and the PMOS spacers 44 preferably comprised of silicon oxide or silicon oxynitride or nitride and preferably of oxide with a thickness between 300 and 800 Å.

J. Perform a NMOS S/D Implant Process

We preferably perform a NMOS S/D implant process 47 to form NMOS S/D regions 48 in the NMOS region 12.

The NMOS S/D implant process comprises forming a NMOS S/D mask 46 over the PMOS region 14 and implanting N type impurity ions 47 into the substrate 10 in the NMOS region 12 and the NMOS gate 26.

The NMOS S/D implant is performed with P or As ions at a dose between 1×10¹⁵/cm² and 1×10¹⁶/cm² and an energy between 2 keV and 30 keV.

We remove the NMOS S/D mask 46.

K. Performing a PMOS S/D Implant

Referring to FIG. 5, we perform a PMOS S/D implant 51 to form PMOS S/D regions 50 in the PMOS region 14.

The PMOS S/D implant process 51 preferably comprises forming a PMOS S/D mask 49 over the NMOS region 12 and implanting P type impurity ions 51 into the substrate 10 in the PMOS region 14 and the PMOS gate 28; and removing the PMOS S/D mask 49.

B+ or BF2+ is implanted into the PMOS gate, As+ or P+ is implanted into the NMOS gate.

The PMOS S/D I/I could dope the poly gate layer. Depending on the thickness of the nitride cap over the poly and the energy of the S/D I/I, the PMOS S/D I/I may dope the poly gate layer. However, the doping of the gate by the S/D I/I is preferably not the main doping for Vt modulation.

The PMOS S/D implant is performed with B or BF₂ ions at a dose between 1×10¹⁵/cm² and 1×10¹⁶/cm² and an energy between 2 keV and 20 keV.

The S/D I/I could be used in co-doping process to dope the gate and affect the work function and get the desired work function or Vt.

L. Annealing the Substrate to Activate the Impurities in the Substrate and in NMOS and PMOS Gates

Next, we anneal the substrate to activate the impurities in the substrate such as the S/D regions, and the NMOS and PMOS gates. Preferably we use an RTA process with a temperature between 1000 and 1300 C for a time between 500 microsec and 5 sec.

M. Form a NMOS Silicon Layer and a PMOS Silicon Layer Using a Selective Epitaxial Growth (SEG) Process

Referring to FIG. 6, we form a NMOS silicon layer 54 over the NMOS S/D region 48 and a PMOS silicon layer 58 over the PMOS S/D region 50 using a selective epitaxial growth (SEG) process.

The NMOS silicon layer 54 and a PMOS silicon layer 58 preferably have a thickness between 30 and 60 nm.

We remove the NMOS cap 30 and the PMOS cap 32 using a selective etch process.

The silicon layers 54 and 58 are formed to a thickness to prevent excessive amounts of the source and drain (S/D) regions from being consumed by the subsequent silicide processes to form the completely fully silicide gates. Hence, the silicidation of the gate (FUSI) and the S/D regions can be done simultaneously. This is different to the conventional way of forming FUSI gates where the gates and the S/D regions are formed separately. Usually, the thin silicide at the S/D regions is formed first, followed by the deposition of more metal to react with the gate to form a thicker silicide at the gates (full silicidation).

N. Depositing a Metal

As shown in FIG. 7, we deposit a metal 62 (e.g., essentially Ni, Pt, NiPt, NiPd or Co, or combinations thereof) over the substrate surface and the NMOS gate 26 and the PMOS gate 28.

We deposit a metal, such as essentially Ni, Pt, NiPt, NiPd or Co and most preferably Ni. The advantages of using an alloy of Ni such as NiPt or NiPd as an alternative metal are that the silicides formed from these alloys with silicon have higher thermal stability than pure nickel silicides. Hence, there is less agglomeration and less undesired growth/formation of NiSi on regions where there should not have any silicide.

The theoretical ratio of the amount of Ni needed to form NiSi is Ni:Si:NiSi=1:1.84:2.22 with ˜10% range limits. For e.g., for the FUSI of a 70 nm poly-Si gate 26 and 28, threshold thickness of Ni 62 to provide sufficient amount of Ni to ensure fully silicidation is 38 nm.

O. Annealing the Metal Layer to Form Fully Silicided NMOS Gate and Fully Silicided PMOS Gate and Raised Silicided NMOS S/D Regions and Raised Silicided PMOS S/D Regions

As shown in FIG. 8, we anneal the metal layer to form fully silicided NMOS gate 70 and fully silicided PMOS gate 78 and raised silicided NMOS S/D regions 68 and raised silicided PMOS S/D regions 74.

Fully silicided means that essentially all of the poly gates 26 and 28 are reacted to form silicide 70 and 78.

Preferably, between 0 and 500 Angstroms of the substrate below the NMOS silicon layer 54 and PMOS silicon layer 58 are consumed.

Layers 68 and 74 preferably have a thickness of between about 55 and 100 nm.

The fully silicided NMOS gate 70 and fully silicided PMOS gate 78 preferably have a thickness between 55 and 100 nm.

If there is any unreacted metal left, we can remove the unreacted metal (e.g., Ni) with an optional selective metal etch process. It is preferably a wet etch.

Thus, FUSI gates with variable work functions are formed. This in turn forms transistors with different threshold voltages.

P. Non-Limiting Features of the Example Embodiment

The embodiment's FUSI gates have many advantages. The advantages of FUSI include: tunable gate work functions with suitable doping, elimination of the poly-Si depletion effect while compatible with conventional semiconductor materials and processes; for e.g. no new etch process is required for gate pattern definition since the poly-Si is first etched to form gate electrodes followed by full silicidation. This is different from the conventional metal gates where the metals are first deposited and etched to form gate electrodes. Also, for conventional metal gates, there is a concern of metallic contamination into the gate dielectric.

The embodiments are intended module the gate work function in the broadest sense. Hence the embodiments can be applied to make 2, 3 or more different work function FUSI gates and it is not limited to “dual work function metal gates”. Present day devices can have multiple gates with different work functions (and Vt) requirements, the embodiments can be used to make 2 or more gates with different work functions (and Vt). Even for the same polarity devices, for e.g., NMOSFETs there is a need to fabricate high Vt, low Vt, and regular Vt NMOS devices.

The embodiments of the invention can have any combination of the following features:

1. use of selective epitaxial growth (SEG) of Si over the source/drain (S/D) regions to form raised S/D structures.

2. The embodiments form NiSi and other metal/silicide fully silicided (FUSI) gates. The advantages of FUSI include: tunable gate work functions with suitable doping, elimination of the poly-Si depletion effect while compatible with conventional semiconductor materials and processes; for e.g. no new etch process is required for gate pattern definition since the poly-Si is first etched to form gate electrodes followed by full silicidation. This is different from the conventional metal gates where the metals are first deposited and etched to form gate electrodes. Also, for conventional metal gates, there is a concern of metallic contamination into the gate dielectric.

3. We can include co-dopants to modulate the Vt such as P+, As+, B+, BF₂+, N+, Sb+, In+, C+, Si+, Ge+ or Ar+.

4. Gate electrodes with three or more work functions can be formed on the same chip.

5. The Source/Drain implants can be used to dope the PMOS and/or NMOS gates (co-doping) to achieve the desired work function.

Q. Non-Limiting Example Embodiments

In the above description numerous specific details are set forth such as flow rates, pressure settings, thicknesses, etc., in order to provide a more thorough understanding of the present invention. It will be obvious, however, to one skilled in the art that the present invention may be practiced without these details. In other instances, well known process have not been described in detail in order to not unnecessarily obscure the present invention.

Unless explicitly stated otherwise, each numerical value and range should be interpreted as being approximate as if the word about or approximately preceded the value of the value or range.

Given the variety of embodiments of the present invention just described, the above description and illustrations show not be taken as limiting the scope of the present invention defined by the claims.

While the invention has been particularly shown and described with reference to the preferred embodiments thereof, it will be understood by those skilled in the art that various changes in form and details may be made without departing from the spirit and scope of the invention. It is intended to cover various modifications and similar arrangements and procedures, and the scope of the appended claims therefore should be accorded the broadest interpretation so as to encompass all such modifications and similar arrangements and procedures. 

1. A method of fabrication of a variable work function gates in a FUSI device; comprising the steps of: a) providing a substrate having a NMOS region and a PMOS region; b) forming a gate dielectric layer and a gate layer over said substrate; c) performing a pre-dope gate layer implant process to implant impurities into the gate layer prior to gate patterning according to Vt requirements; d) forming a cap layer over said gate layer; e) patterning said cap layer, said gate layer and said gate dielectric layer to NMOS gate dielectric layer, a NMOS gate and a NMOS cap in said NMOS region and a PMOS gate dielectric layer, a PMOS gate and a PMOS cap in said PMOS region; (1) said NMOS gate dielectric layer, said NMOS gate and said NMOS cap form a NMOS gate structure; (2) said PMOS gate dielectric layer, a PMOS gate and a PMOS cap form a PMOS gate structure; f) forming a NMOS transistor having a fully silicided gate using said NMOS gate structure and a PMOS transistor having a fully silicided gate using said PMOS gate structure; whereby the fully silicided NMOS gate and fully silicided PMOS gate have variable work functions.
 2. The method of claim 1 wherein the pre-dope gate layer implant process comprises; masking said gate layer in the PMOS region and implanting pre-gate dopants into the gate layer in the NMOS region to form a NMOS gate region; and masking said gate layer in the NMOS region and implanting pre-gate dopants into the gate layer in the PMOS region to form a PMOS gate region.
 3. The method of claim 1 which further includes: a) forming a cap layer over said gate layer; b) patterning said cap layer, said gate layer and said gate dielectric layer to form a NMOS gate dielectric layer, a NMOS gate and NMOS cap in said NMOS region and a PMOS gate dielectric layer, a PMOS gate and PMOS cap in said PMOS region; c) forming NMOS spacers on the sidewalls of said NMOS gate and forming PMOS spacers on the sidewalls of said PMOS gate; d) performing a NMOS S/D implant process to form NMOS S/D regions in said NMOS region; e) performing a PMOS S/D implant to form PMOS S/D regions in said PMOS region; f) removing said NMOS cap and said PMOS cap using an selective etch process; g) depositing a metal over said substrate surface and said NMOS gate and said PMOS gate; h) annealing said metal layer to form fully silicided NMOS gate and fully silicided PMOS gate and; thereby the fully silicided NMOS gate and fully silicided PMOS gate have variable work functions.
 4. A method of fabrication of a variable work function gates in a FUSI device; comprising the steps of: a) providing a substrate having a NMOS region and a PMOS region; b) forming a gate dielectric layer and a gate layer over said substrate; c) performing a pre-dope gate layer implant process to implant impurities into the gate layer in the NMOS and PMOS regions prior to gate patterning, according to Vt requirements; d) forming a cap layer over said gate layer; e) patterning said cap layer, said gate layer and said gate dielectric layer to form a NMOS gate dielectric layer, a NMOS gate and NMOS cap in said NMOS region and a PMOS gate dielectric layer, a PMOS gate and PMOS cap in said PMOS region; f) performing a NMOS SDE implant process to form NMOS SDE regions in said NMOS region; g) performing a PMOS SDE implant to form PMOS SDE regions in said PMOS region; h) forming NMOS spacers on the sidewalls of said NMOS gate and forming PMOS spacers on the sidewalls of said PMOS gate; i) performing a NMOS S/D implant process to form NMOS S/D regions in said NMOS region; j) performing a PMOS S/D implant to form PMOS S/D regions in said PMOS region; k) annealing said substrate to activate the impurities in said substrate and in NMOS and PMOS gates; l) forming a NMOS silicon layer over said NMOS S/D region and a PMOS silicon layer over said PMOS S/D region using a selective epitaxial growth process; m) removing said NMOS cap and said PMOS cap using an selective etch process; n) depositing a metal over said substrate surface and said NMOS gate and said PMOS gate; o) annealing said metal layer to form fully silicided NMOS gate and fully silicided PMOS gate and raised silicided NMOS S/D regions and raised silicided PMOS S/D regions; thereby the fully silicided NMOS gate and fully silicided PMOS gate have variable work functions.
 5. The method of claim 4 wherein the pre-dope gate layer implant process comprises; masking said gate layer in the PMOS region and implanting pre-gate dopants into the gate layer in the NMOS region to form a NMOS gate region; and masking said gate layer in the NMOS region and implanting pre-gate dopants into the gate layer in the PMOS region to form a PMOS gate region.
 6. The method of claim 4 wherein the pre-dope gate layer implant process comprises impurities of a material selected from the group consisting of P+, As+, B+, BF₂+, N+, Sb+, In+, C+, Si+, Ge+ and Ar+; and combinations thereof.
 7. The method of claim 4 wherein the pre-dope gate layer implant process comprises implanting an impurities selected from the group consisting of P+, As+, B+, BF₂+, N+, Sb+, In+, C+, Si+, Ge+ and Ar+; and combinations thereof; at an implantation dose between 5×10¹⁴/cm² and 1×10¹⁶/cm², at an implantation energy between 3 keV and 100 keV.
 8. The method of claim 4 wherein the impurity concentration in the gate layer is between about 1E18 atoms/cm³ and 3E20 atoms/cm³.
 9. The method of claim 1 wherein the pre-dope gate layer implant process comprises implanting impurities of two or more type ions; the ions are impurities selected from the group consisting of P+, As+, B+, BF₂+, N+, Sb+, In+, C+, Si+, Ge+ and Ar+; and combinations thereof.
 10. The method of claim 4 wherein the NMOS S/D implant process includes implanting impurities into said NMOS gate to adjust the NMOS gate work function.
 11. The method of claim 4 wherein the PMOS S/D implant process includes implanting impurities into said PMOS gate to adjust the PMOS gate work function.
 12. The method of claim 4 wherein the metal is made of a material selected from the group consisting of Ni, Pt, NiPt, NiPd or Co.
 13. A method of fabrication of a variable work function gates in a FUSI device; comprising the steps of: a) providing a substrate having a NMOS region and a PMOS region; b) forming a gate dielectric layer and a gate layer over said substrate; c) performing a pre-dope gate layer implant process to implant impurities into the gate layer in the NMOS regions and PMOS regions prior to gate patterning according to Vt requirements; (1) the impurities are a material selected from the group consisting of P+, As+, B+, BF₂+, N+, Sb+, In+, C+, Si+, Ge+ and Ar+; and combinations thereof; (2) the impurity concentration in said gate layer is between about 1E18 atoms/cm³ and 3E20 atoms/cm³; d) forming a cap layer over said gate layer; said cap layer is comprised of SiN and has a thickness between 300 and 800 angstroms; e) patterning said cap layer, said gate layer and said gate dielectric layer to form a NMOS gate dielectric layer, a NMOS gate and NMOS cap in said NMOS region and a PMOS gate dielectric layer, a PMOS gate and PMOS cap in said PMOS region; f) performing a NMOS SDE implant process to form NMOS SDE regions in said NMOS region; g) performing a PMOS SDE implant to form PMOS SDE regions in said PMOS region; h) forming NMOS spacers on the sidewalls of said NMOS gate and forming PMOS spacers on the sidewalls of said PMOS gate; i) performing a NMOS S/D implant process to form NMOS S/D regions in said NMOS region; j) performing a PMOS S/D implant to form PMOS S/D regions in said PMOS region; k) annealing said substrate to activate the impurities in said substrate and in NMOS and PMOS gates; l) forming a NMOS silicon layer over said NMOS S/D region and a PMOS silicon layer over said PMOS S/D region using a selective epitaxial growth process; m) removing said NMOS cap and said PMOS cap using an selective etch process; n) depositing a metal over said substrate surface and said NMOS gate and said PMOS gate; (1) the metal is made of a material selected from the group consisting of Ni, Pt, NiPt, NiPd or Co; o) annealing said metal layer to form fully silicided NMOS gate and fully silicided PMOS gate and raised silicided NMOS S/D regions and raised silicided PMOS S/D regions; thereby the fully silicided NMOS gate and fully silicided PMOS gate have variable work functions.
 14. The method of claim 13 wherein the pre-dope gate layer implant process comprises implanting impurities selected from the group consisting of P+, As+, B+, BF₂+, N+, Sb+, In+, C+, Si+, Ge+ and Ar+; and combinations thereof; at an implantation dose between 5×10¹⁴/cm² and 1×10¹⁶/cm², at an implantation energy between 3 keV and 100 keV.
 15. The method of claim 13 wherein the pre-dope gate layer implant process comprises implanting impurities of two or more type ions; the ions are impurities selected from the group consisting of P+, As+, B+, BF₂+, N+, Sb+, In+, C+, Si+, Ge+ and Ar+; and combinations thereof.
 16. The method of claim 13 wherein the NMOS S/D implant process includes implanting impurities into said NMOS gate to adjust the NMOS gate workfunction.
 17. The method of claim 13 wherein the PMOS S/D implant process includes implanting impurities into said PMOS gate to adjust the PMOS gate work function.
 18. A method of fabrication of a variable work function gates in a FUSI device; comprising the steps of: a) providing a substrate having a NMOS region and a PMOS region; (1) said substrate having isolation regions that separate said NMOS region and said PMOS region; b) forming a gate dielectric layer and a gate layer over said substrate; said gate layer comprised of NMOS gate regions and PMOS gate regions; c) performing a pre-dope gate layer implant process to implant impurities into the gate layer in the NMOS gate regions and PMOS gate regions prior to gate patterning according to Vt requirements; (1) the pre-dope gate layer implant process comprises; masking said gate layer in the PMOS region and implanting pre-gate dopants into the gate layer in the NMOS region to form a NMOS gate region; and masking said gate layer in the NMOS region and implanting pre-gate dopants into the gate layer in the PMOS region to form a PMOS gate region; (2) the pre-dope polysilicon implant process comprises implanting an impurities selected from the group consisting of P+, As+, B+, BF₂+, N+, Sb+, In+, C+, Si+, Ge+ and Ar+; and combinations thereof; at an implantation dose between 5×10¹⁴/cm² and 1×10¹⁶/cm², at an implantation energy between 3 keV and 100 keV; (3) the impurity concentration in the said gate layer is between about 1E18 atoms/cm³ and 3E20 atoms/cm³; d) forming a cap layer over said gate layer; said cap layer is comprised of SiN and has a thickness between 300 and 800 angstroms; e) patterning said cap layer, said gate layer and said gate dielectric layer to form a NMOS gate dielectric layer, a NMOS gate and NMOS cap in said NMOS region and a PMOS gate dielectric layer, a PMOS gate and PMOS cap in said PMOS region; f) performing a NMOS SDE implant process to form NMOS SDE regions in said NMOS region; (1) the NMOS SDE implant process comprises forming a NMOS SDE mask over said PMOS region and implanting N type impurity ions into said substrate in said NMOS region and said NMOS gate; and removing said NMOS SDE mask; (2) the NMOS SDE implant process is performed with P or As ions at a dose between 5×10¹⁴/cm² and 3×10¹⁵/cm² and an energy between 0.5 keV and 15 keV; g) performing a PMOS SDE implant to form PMOS SDE regions in said PMOS region; (1) the PMOS SDE implant process comprises forming a PMOS SDE mask over said NMOS region and implanting P type impurity ions into said substrate in said PMOS region and said PMOS gate; and removing said PMOS SDE mask; (2) the PMOS SDE implant process is performed with B or BF₂ ions at a dose between 5×10¹⁴/cm² and 3×10¹⁵/cm² and an energy between 0.2 keV and 10 keV; h) forming NMOS spacers on the sidewalls of said NMOS gate and forming PMOS spacers on the sidewalls of said PMOS gate; (1) said NMOS spacers and said PMOS spacers comprised of silicon oxide or silicon oxynitride or nitride and with a thickness between 300 and 800 Å; i) performing a NMOS S/D implant process to form NMOS S/D regions in said NMOS region; (1) the NMOS S/D implant process comprises forming a NMOS S/D mask over said PMOS region and implanting N type impurity ions into said substrate in said NMOS region and said NMOS gate; and removing said NMOS S/D mask; (2) the NMOS S/D implant process includes implanting impurities into said NMOS gate to adjust the NMOS gate workfunction; j) performing a PMOS S/D implant to form PMOS S/D regions in said PMOS region; (1) the PMOS S/D implant process comprises forming a PMOS S/D mask over said NMOS region and implanting P type impurity ions into said substrate in said PMOS region and said PMOS gate; and removing said PMOS S/D mask; (2) the PMOS S/D implant process includes implanting impurities into said PMOS gate to adjust the PMOS gate work function; k) annealing said substrate to activate the impurities in said substrate and in NMOS and PMOS gates; l) forming a NMOS silicon layer over said NMOS S/D region and a PMOS silicon layer over said PMOS S/D region using a selective epitaxial growth process; (1) NMOS silicon layer and a PMOS silicon layer have a thickness between 30 and 60 nm; m) removing said NMOS cap and said PMOS cap using an selective etch process; n) depositing a metal over said substrate surface and said NMOS gate and said PMOS gate; (1) the metal is made of a material selected from the group consisting of Ni, Pt, NiPt, NiPd or Co; o) annealing said metal layer to form fully silicided NMOS gate and fully silicided PMOS gate and raised silicided NMOS S/D regions and raised silicided PMOS S/D regions; thereby the fully silicided NMOS gate and fully silicided PMOS gate have variable work functions.
 19. The method of claim 18 the pre-dope gate layer implant process comprises implanting impurities of two or more type ions; the ions are impurities selected from the group consisting of P+, As+, B+, BF₂+, N+, Sb+, In+, C+, Si+, Ge+ and Ar+; and combinations thereof. 